Effect of gas pressure on residual stresses
in AlN films deposited on Al substrates

TIANJing(田竞),XUEXiang(薛祥),TakaoHanabusa,KazayaKusaka

Transactions of Nonferrous Metals Society of China ›› 2003, Vol. 13 ›› Issue (Special 1) : 202-205.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2003, Vol. 13 ›› Issue (Special 1) : 202-205.
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Effect of gas pressure on residual stresses
in AlN films deposited on Al substrates

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 13(Special 1): 202-205

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